Optical Metrology Tool

The Vendor is required to provide outdated optical metrology tool with a newer, more capable system, compatible with modern computer operating systems.
- Mandatory requirements
1. Surface imaging
• True colour imaging
• Infinite depth-of-field imaging for every pixel in focus across any height variation
• Image stitching for large field-of-view
2. Surface profilometry
• Z-height measurement resolution 1 nm or better
• Width measurement resolution of 0.1 µM or better
3. Motorized and automated stage travel
• Motorized stage travel with range ≥ 100 mm x 100 mm
4. Analysis software
• Standard suite of profilometry measurements including roughness parameters evaluation
• Automated data acquisition and image stitching for large area analyses
• Macro programmability for repeated and routine analyses
• 3d surface data exportable in non-proprietary file format(s)
• Perpetual license with no expiration
5. Objective lenses
• Inclusion of 5x, 10x, 20x, 50x, and 100x magnification objective lenses (or similar range)
6. Installation training
• In-person training session included with installation
7. Warranty
• All parts and labour for a minimum period of 12 months
- Optional requirements
1. Computer workstation and software licensing
• Workstation and monitor included with tool
• Software license includes multi-computer installation for offline data analysis (or includes an additional individual license for standalone analysis pc)
2. Additional objective lense options
• Long working distance objective lenses
3. Vibration isolation
• Benchtop anti-vibration platform or other vibration cancellation system
4. Motorized sample rotational scanning
• Motorized rotational scanning: motorized θ/rotational axis; preferably suitable for curved parts, grooves, and sidewalls.
5. Extended motorized stage travel
• Motorized stage travel with range ≥ 200 mm x 200 mm
6. High z-range surface profilometry
• Modal operation for high z-range and low z-range measurements and resolutions
• High z-range measurement: ≥10 mm without z stitching; preferred 30–50 mm with z stitching
• High z-range resolution 0.1 µM or better
• Low-magnification wide-area 3d measurement: ≥10 × 10 mm single field of view.